Patent Assignment
Reel/Frame 033822/0039
Assignment of Assignor's Interest
Recorded: 2014-09-25
Pages: 4
Assignors
MATSUSHITA, JUN
Executed: 2014-07-25
NAGASHIMA, YUJI
Executed: 2014-07-25
HAYASHI, KONOSUKE
Executed: 2014-07-25
MIYAZAKI, KUNIHIRO
Executed: 2014-07-25
Assignee
SHIBAURA MECHATRONICS CORPORATION
5-1, KASAMA 2-CHOME, SAKAE-KU, YOKOHAMA-SHI, KANAGAWA, JAPAN
Covered Property
(1)
Substrate Processing Device and Substrate Processing Method
Application:
14/495,314 →
Publication:
US 2015/0090297