Patent Assignment
Reel/Frame 033822/0066
Assignment of Assignor's Interest
Recorded: 2014-09-25
Pages: 5
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device by Alternatively Increasing and Decreasing Pressure of Process Chamber
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.