Patent Assignment
Reel/Frame 033824/0559
Assignment of Assignor's Interest
Recorded: 2014-09-26
Pages: 9
Assignors
TOYODA, KAZUYUKI
Executed: 2014-09-08
HIROCHI, YUKITOMO
Executed: 2014-09-16
YAMAMOTO, TETSUO
Executed: 2014-09-08
MORIMITSU, KAZUHIRO
Executed: 2014-09-08
TAKASAKI, TADASHI
Executed: 2014-09-08
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.