Patent Assignment
Reel/Frame 033829/0205
Assignment of Assignor's Interest
Recorded: 2014-09-26
Pages: 8
Assignors
YAMAMOTO, TETSUO
Executed: 2014-08-04
MORIMITSU, KAZUHIRO
Executed: 2014-08-04
TOYODA, KAZUYUKI
Executed: 2014-08-04
ONO, KENJI
Executed: 2014-08-04
TAKASAKI, TADASHI
Executed: 2014-08-04
HIROSE, IKUO
Executed: 2014-08-03
SASAKI, TAKAFUMI
Executed: 2014-08-04
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA, 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.