Patent Assignment
Reel/Frame 033876/0225
Assignment of Assignor's Interest
Recorded: 2014-10-02
Pages: 3
Assignor
FUKUDA, HIDEAKI
Executed: 2011-12-16
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Method of Forming Metal Oxide Hardmask