Patent Assignment
Reel/Frame 033888/0247
Assignment of Assignor's Interest
Recorded: 2014-10-06
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Drawing Apparatus, and Method of Manufacturing Article, by Controlling a Plurality of Charged Particle Optical Systems Based on Respective Sets of Sub-Drawing Regions