Patent Assignment
Reel/Frame 033891/0873
Assignment of Assignor's Interest
Recorded: 2014-10-06
Pages: 4
Assignors
SHI, RUI-FANG
Executed: 2013-05-14
POKROVSKIY, ALEX
Executed: 2013-05-14
SEZGINER, ABDURRAHMAN
Executed: 2013-05-14
SOUSA, WESTON L.
Executed: 2013-05-14
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Critical Dimension Uniformity Monitoring for Extreme Ultraviolet Reticles