Patent Assignment
Reel/Frame 033893/0856
Assignment of Assignor's Interest
Recorded: 2014-10-06
Pages: 7
Assignors
SIRARD, STEPHEN M.
Executed: 2014-09-26
KALINOVSKI, ILIA
Executed: 2014-10-02
HAHN, JEFF
Executed: 2014-09-24
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Drying High Aspect Ratio Structures Without Collapse Using Sacrificial Bracing Material That Is Removed Using Hydrogen-Rich Plasma