Patent Assignment
Reel/Frame 033894/0921
Assignment of Assignor's Interest
Recorded: 2014-10-06
Pages: 2
Assignor
SIX, STEPHAN
Executed: 2011-11-17
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Imaging with Reduced Immersion Liquid Evaporation Effects