Patent Assignment
Reel/Frame 033903/0132
Assignment of Assignor's Interest
Recorded: 2014-10-07
Pages: 4
Assignor
NAKASHIMA, TSUNENAGA
Executed: 2014-10-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Chemical Liquid Container Replacement Device, Container Mounting Module, Chemical Liquid Container Replacement Method, and Substrate Processing Apparatus
Application:
14/508,005 →
Publication:
US 2015/0096682