Patent Assignment
Reel/Frame 033905/0001
Assignment of Assignor's Interest
Recorded: 2014-10-07
Pages: 7
Assignors
YANAI, HIDEHIRO
Executed: 2014-09-29
ASHIHARA, HIROSHI
Executed: 2014-09-29
SANO, ATSUSHI
Executed: 2014-09-29
TAKASAKI, TADASHI
Executed: 2014-09-29
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.