Patent Assignment
Reel/Frame 033908/0857
Assignment of Assignor's Interest
Recorded: 2014-10-08
Pages: 3
Assignor
WUISTER, SANDER FREDERIK
Executed: 2012-04-24
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Methods for Providing Spaced Lithography Features on a Substrate by Self-Assembly of Block Copolymers