Patent Assignment
Reel/Frame 033925/0612
Assignment of Assignor's Interest
Recorded: 2014-10-09
Pages: 3
Assignors
KITAMURA, AKINORI
Executed: 2014-07-04
YASUDA, KENTA
Executed: 2014-07-04
ISHIDA, SHUNSUKE
Executed: 2014-09-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Method and Plasma Etching Apparatus