Patent Assignment
Reel/Frame 033955/0024
Assignment of Assignor's Interest
Recorded: 2014-10-15
Pages: 3
Assignors
TZU, GWO-CHUAN
Executed: 2014-10-02
DAITO, KAZUYA
Executed: 2014-10-03
LEE, SANG-HYEOB
Executed: 2014-10-02
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Apparatus to Improve Substrate Temperature Uniformity