Assignment of Assignor's Interest

Recorded: 2014-10-16 Pages: 4

Assignors

ASHIZAWA, HIROAKI

Executed: 2014-10-09

SATO, MISUZU

Executed: 2014-10-09

Assignee

TOKYO ELECTRON LIMITED

3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Film Forming Method and Film Forming Apparatus

Patent: 9,963,784 →

Application: 14/516,460 →

Publication: US 2015/0110959