Patent Assignment
Reel/Frame 034001/0713
Assignment of Assignor's Interest
Recorded: 2014-10-22
Pages: 4
Assignors
DHAS, ARUL
Executed: 2004-10-16
BOUMATAR, KAREEM
Executed: 2014-10-16
RAMSAYER, CHRISTOPHER JAMES
Executed: 2014-10-16
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Defect Control and Stability of Dc Bias in Rf Plasma-Based Substrate Processing Systems Using Molecular Reactive Purge Gas