Patent Assignment
Reel/Frame 034005/0226
Assignment of Assignor's Interest
Recorded: 2014-10-22
Pages: 3
Assignors
SUGITA, KIPPEI
Executed: 2014-10-03
HASHIMOTO, HIROYUKI
Executed: 2014-10-03
HARADA, MUNEO
Executed: 2014-10-03
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Depositing a Film and Film Deposition Apparatus