Patent Assignment
Reel/Frame 034008/0526
Assignment of Assignor's Interest
Recorded: 2014-10-22
Pages: 8
Assignors
AZORDEGAN, AMIR
Executed: 2014-10-08
VUKKADALA, PRADEEP
Executed: 2014-10-09
MACNAUGHTON, CRAIG
Executed: 2014-10-09
SINHA, JAYDEEP
Executed: 2014-10-21
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Enhanced Patterned Wafer Geometry Measurements Based Design Improvements for Optimal Integrated Chip Fabrication Performance