Patent Assignment
Reel/Frame 034022/0946
Assignment of Assignor's Interest
Recorded: 2014-10-23
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Buffer Station for Thermal Control of Semiconductor Substrates Transferred Therethrough and Method of Transferring Semiconductor Substrates