Patent Assignment
Reel/Frame 034030/0690
Assignment of Assignor's Interest
Recorded: 2014-10-24
Pages: 5
Assignor
SAIDO, SHUHEI
Executed: 2014-08-01
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.