Patent Assignment
Reel/Frame 034089/0574
Assignment of Assignor's Interest
Recorded: 2014-11-03
Pages: 6
Assignees
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
DAIHEN CORPORATION
2-1-11, TAGAWA, YODOGAWA-KU, OSAKA-SHI, OSAKA, 532-8512, JAPAN
Covered Property
(1)
Plasma Processing Apparatus