Patent Assignment
Reel/Frame 034102/0395
Assignment of Assignor's Interest
Recorded: 2014-11-04
Pages: 5
Assignors
OR, DAVID T.
Executed: 2014-09-30
COLLINS, JOSHUA
Executed: 2014-09-12
CHANG, MEI
Executed: 2014-09-16
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Directional SIO2 Etch Using Plasma Pre-Treatment and High-Temperature Etchant Deposition