Patent Assignment
Reel/Frame 034106/0258
Assignment of Assignor's Interest
Recorded: 2014-11-05
Pages: 5
Assignors
HIGASHIJIMA, JIRO
Executed: 2014-10-08
DOUKI, YUICHI
Executed: 2014-10-08
AKIMOTO, MASAMI
Executed: 2014-10-08
INOUE, SHIGEHISA
Executed: 2014-10-25
Assignee
TOKYO ELECTRON LMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus