Patent Assignment
Reel/Frame 034152/0883
Assignment of Assignor's Interest
Recorded: 2014-11-12
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Depositing Metal Layers on Germanium-Containing Films Using Metal Chloride Precursors