Patent Assignment
Reel/Frame 034165/0096
Assignment of Assignor's Interest
Recorded: 2014-11-13
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Adjustment of Vuv Emission of a Plasma via Collisional Resonant Energy Transfer to an Energy Absorber Gas