Patent Assignment
Reel/Frame 034179/0762
Assignment of Assignor's Interest
Recorded: 2014-11-14
Pages: 5
Assignors
KUMAGAI, KEITA
Executed: 2014-11-05
SASAKI, YOSHIAKI
Executed: 2014-11-05
KIKUSHIMA, HIROHITO
Executed: 2014-11-05
ITOMI, HAYATO
Executed: 2014-11-05
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cooling Mechanism and Processing System