Patent Assignment
Reel/Frame 034180/0343
Assignment of Assignor's Interest
Recorded: 2014-11-06
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Probe Apparatus