Patent Assignment
Reel/Frame 034203/0822
Assignment of Assignor's Interest
Recorded: 2014-11-19
Pages: 3
Assignee
KABUSHIKI KAISHA YASKAWA DENKI
2-1, KUROSAKI-SHIROISHI, YAHATANISHI-KU, KITAKYUSHU-SHI, FUKUOKA, 806-0004, JAPAN
Covered Property
(1)
Substrate Transfer Robot, Substrate Transfer System, and Method for Transferring Substrate