Patent Assignment
Reel/Frame 034216/0603
Assignment of Assignor's Interest
Recorded: 2014-11-20
Pages: 2
Assignors
KAWAKAMI, MASATOSHI
Executed: 2014-10-30
NAKAMURA, TSUTOMU
Executed: 2014-08-20
KIHARA, HIDEKI
Executed: 2014-08-20
KITADA, HIROHO
Executed: 2014-08-20
TANIMURA, HIDENOBU
Executed: 2014-08-20
KUSUMOTO, HIRONORI
Executed: 2014-08-20
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus
Application:
14/463,756 →
Publication:
US 2015/0214083