Patent Assignment
Reel/Frame 034217/0660
Assignment of Assignor's Interest
Recorded: 2014-11-20
Pages: 4
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Drying High Aspect Ratio Structures Without Collapse Using Stimuli-Responsive Sacrificial Bracing Material