Patent Assignment
Reel/Frame 034248/0063
Assignment of Assignor's Interest
Recorded: 2014-11-24
Pages: 3
Assignors
SHINOHARA, TAKASHI
Executed: 2014-10-20
SHIBUKAWA, JUN
Executed: 2014-10-20
KATO, HIROSHI
Executed: 2014-10-28
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Inverting Apparatus and Substrate Processing Apparatus