Patent Assignment
Reel/Frame 034254/0439
Assignment of Assignor's Interest
Recorded: 2014-11-24
Pages: 3
Assignors
HENRI, JON
Executed: 2014-11-17
HAUSMANN, DENNIS M.
Executed: 2014-11-17
TANG, SHANE
Executed: 2014-11-17
SIMS, JAMES S.
Executed: 2014-11-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Depositing Ammonia Free and Chlorine Free Conformal Silicon Nitride Film