Patent Assignment
Reel/Frame 034264/0221
Assignment of Assignor's Interest
Recorded: 2014-11-25
Pages: 2
Assignor
EOM, SANGHEE
Executed: 2014-11-21
Assignee
PSK INC.
48, SAMSUNG 1-RO 4-GIL, HWASEONG-SHI, GYEONGGI-DO, 445-170, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Transfer Apparatus and Method, and Substrate Processing Apparatus