Patent Assignment
Reel/Frame 034264/0973
Assignment of Assignor's Interest
Recorded: 2014-11-25
Pages: 6
Assignors
SHINOZAKI, HIROYUKI
Executed: 2014-09-17
SHINKAI, KENJI
Executed: 2014-09-17
SONE, TADAKAZU
Executed: 2014-09-17
AIZAWA, HIDEO
Executed: 2014-09-17
AONO, HIROSHI
Executed: 2014-09-17
YOKOYAMA, TOSHIO
Executed: 2014-09-19
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Lifting Device, Substrate Processing Apparatus Having Lifting Device, and Unit Transferring Method