Patent Assignment
Reel/Frame 034265/0269
Assignment of Assignor's Interest
Recorded: 2014-11-25
Pages: 6
Assignors
SATO, TAKETOSHI
Executed: 2014-10-30
HIRAMATSU, HIROAKI
Executed: 2014-10-30
HIROCHI, YUKITOMO
Executed: 2014-10-30
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.