Patent Assignment
Reel/Frame 034269/0131
Assignment of Assignor's Interest
Recorded: 2014-11-26
Pages: 3
Assignors
VALCORE, JOHN C., JR.
Executed: 2014-11-20
SAN, TONY
Executed: 2014-11-21
LEE, SEONKYUNG
Executed: 2014-10-26
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System, Method and Apparatus for Using Optical Data to Monitor RF Generator Operations