Patent Assignment
Reel/Frame 034352/0728
Assignment of Assignor's Interest
Recorded: 2014-12-03
Pages: 6
Assignors
VARADARAJAN, SESHA
Executed: 2014-11-21
SWAMINATHAN, SHANKAR
Executed: 2014-12-02
SANGPLUNG, SAANGRUT
Executed: 2014-11-21
PASQUALE, FRANK
Executed: 2014-11-21
MINSHALL, TED
Executed: 2014-11-21
LAVOIE, ADRIEN
Executed: 2014-11-21
SABRI, MOHAMED
Executed: 2014-11-21
BARNETT, CODY
Executed: 2014-11-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Reducing Backside Deposition and Mitigating Thickness Changes at Substrate Edges