Patent Assignment
Reel/Frame 034380/0680
Assignment of Assignor's Interest
Recorded: 2014-12-04
Pages: 3
Assignor
NAKANO, KATSUAKI
Executed: 2014-11-27
Assignee
ULVAC, INC.
2500, HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8543, JAPAN
Covered Property
(1)
Method of, and Apparatus for, Forming Hard Mask