Patent Assignment
Reel/Frame 034505/0101
Assignment of Assignor's Interest
Recorded: 2014-12-15
Pages: 4
Assignors
CHANG, JUI-CHUAN
Executed: 2014-10-28
KU, SHAO-YEN
Executed: 2014-10-29
TSAI, WEN-CHANG
Executed: 2014-10-28
YU, SHANG-YUAN
Executed: 2014-10-28
HSIAO, CHIEN-WEN
Executed: 2014-10-28
HSU, FAN-YI
Executed: 2014-10-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Semiconductor Apparatus and Method of Removing Photoresist Layer on Substrate