Patent Assignment
Reel/Frame 034505/0144
Assignment of Assignor's Interest
Recorded: 2014-12-15
Pages: 3
Assignor
MATSUDO, TATSUO
Executed: 2014-12-10
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Wear Amount Measuring Apparatus and Method, Temperature Measuring Apparatus and Method and Substrate Processing System