Patent Assignment
Reel/Frame 034519/0161
Assignment of Assignor's Interest
Recorded: 2014-12-16
Pages: 4
Assignors
XU, LIN
Executed: 2014-12-09
SHIH, HONG
Executed: 2014-12-09
ANDERSON, NASH
Executed: 2014-12-16
STEVENSON, TOM
Executed: 2014-12-09
DAUGHERTY, JOHN
Executed: 2014-12-10
KERNS, JOHN MICHAEL
Executed: 2014-12-10
O'NEILL, ROBERT GRIFFITH
Executed: 2014-12-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Coating System and Method for Coating Interior Fluid Wetted Surfaces of a Component of a Semiconductor Substrate Processing Apparatus