Patent Assignment
Reel/Frame 034524/0445
Assignment of Assignor's Interest
Recorded: 2014-12-17
Pages: 4
Assignors
OGIHARA, TSUTOMU
Executed: 2014-11-25
NAGATA, TAKESHI
Executed: 2014-11-25
HATAKEYAMA, JUN
Executed: 2014-11-25
KORI, DAISUKE
Executed: 2014-11-25
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Cleaning and Drying Semiconductor Substrate