Patent Assignment
Reel/Frame 034543/0497
Assignment of Assignor's Interest
Recorded: 2014-12-18
Pages: 3
Assignors
NARISHIGE, KAZUKI
Executed: 2014-12-09
SATO, TAKANORI
Executed: 2014-12-09
SATO, MANABU
Executed: 2014-12-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus