Patent Assignment
Reel/Frame 034547/0013
Assignment of Assignor's Interest
Recorded: 2014-12-18
Pages: 7
Assignors
BAO, JUNWEI
Executed: 2014-10-31
MENG, CHING-LING
Executed: 2014-11-06
TUITJE, HOLGER
Executed: 2014-11-06
MIHAYLOV, MIHAIL D.
Executed: 2014-11-06
CHEN, YAN
Executed: 2014-11-06
YAN, ZHENG
Executed: 2014-11-06
ZOU, HAIXING
Executed: 2014-11-06
CHU, HANYOU
Executed: 2014-12-16
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Spatially Resolved Optical Emission Spectroscopy (Oes) in Plasma Processing