Patent Assignment
Reel/Frame 034557/0013
Assignment of Assignor's Interest
Recorded: 2014-12-19
Pages: 5
Assignor
HIROKI, TSUTOMU
Executed: 2014-12-16
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Stage, Stage Manufacturing Method, and Heat Exchanger