Patent Assignment
Reel/Frame 034561/0615
Assignment of Assignor's Interest
Recorded: 2014-12-19
Pages: 8
Assignors
THEDJOISWORO, BAYU
Executed: 2014-12-15
ZHU, HELEN
Executed: 2014-12-15
MARQUEZ, LINDA
Executed: 2014-12-19
PARK, JOON
Executed: 2014-12-11
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Contact Clean in High-Aspect Ratio Structures