Patent Assignment
Reel/Frame 034578/0027
Assignment of Assignor's Interest
Recorded: 2014-12-23
Pages: 7
Assignors
NARUSHIMA, KENSAKU
Executed: 2014-12-16
SATOH, KOHICHI
Executed: 2014-12-16
NAKAGOMI, MOTOKO
Executed: 2014-12-16
KOMORI, EIICHI
Executed: 2014-12-16
KATOU, TAIKI
Executed: 2014-12-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method, Storage Medium and Etching Apparatus