Patent Assignment
Reel/Frame 034592/0060
Assignment of Assignor's Interest
Recorded: 2014-12-29
Pages: 4
Assignors
NAKATANI, KIMIHIKO
Executed: 2014-10-07
HARADA, KAZUHIRO
Executed: 2014-10-10
ASHIHARA, HIROSHI
Executed: 2014-10-07
YAMAMOTO, RYUJI
Executed: 2014-10-14
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.