Patent Assignment
Reel/Frame 034592/0595
Assignment of Assignor's Interest
Recorded: 2014-12-29
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Film Forming Method and Film Forming Device