Patent Assignment
Reel/Frame 034599/0185
Assignment of Assignor's Interest
Recorded: 2014-12-30
Pages: 5
Assignors
TSEN, YEN-DI
Executed: 2014-12-09
HSIEH, YI-PING
Executed: 2014-12-09
HUANG, CHEN-YEN
Executed: 2014-12-09
LU, SHIN-RUNG
Executed: 2014-12-09
MOU, JONG-I
Executed: 2014-12-09
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Scanner Overlay Correction System and Method